RMMT23026 Model Name: Tactras Vigus RK3 to RK5 OX Upgrade KitWafer Size: 300Serial Number: TBDConfiguration: RK3 to RK5 OX Upgrade KitDate Available: 01/30/2023Group: ElectronicOwner: MicronCategory: Semiconductor FabricationFamily: Etch EquipmentType: Oxide Etch SystemManufacturer: TELLocation: SINGAPORE