RMMT23020

  • Model Name: INDY Plus - 4" Hi-Vac Line and 80k Pump Capacity Upgrade
  • Wafer Size: 300
  • Serial Number: TBD
  • Configuration: 4" Hi-Vac Line and 80k Pump Capacity Upgrade
  • Date Available: 01/30/2023
  • Group: Electronic
  • Owner: Micron
  • Category: Semiconductor Fabrication
  • Family: Traditional Furnaces / Diffusion Systems
  • Type: Vertical Oxide Furnace
  • Manufacturer: TEL
  • Location: SINGAPORE