RMMT23015

  • Model Name: Tactras Vigus LK3+
  • Wafer Size: 300
  • Serial Number: TBD
  • Configuration: 6 Chamber - Di-electric Etch
  • Date Available: 01/30/2023
  • Group: Electronic
  • Owner: Micron
  • Category: Semiconductor Fabrication
  • Family: Etch Equipment
  • Type: Plasma Etch System
  • Manufacturer: TEL
  • Location: SINGAPORE