RMMT23015 Model Name: Tactras Vigus LK3+Wafer Size: 300Serial Number: TBDConfiguration: 6 Chamber - Di-electric EtchDate Available: 01/30/2023Group: ElectronicOwner: MicronCategory: Semiconductor FabricationFamily: Etch EquipmentType: Plasma Etch SystemManufacturer: TELLocation: SINGAPORE