RMKS22001 Model Name: UPC-12100 FOUP Cleaning SystemWafer Size: 300Serial Number: CH07060Date Available: 01/18/2022Group: ElectronicOwner: KOSTECCategory: Semiconductor FabricationFamily: Clean Rooms and EquipmentType: Carrier Inspection/CleanerManufacturer: Hugle ElectronicsLocation: TAIWAN