RMMT23016

  • Model Name: 2600 e6 Flex FXP to HXE Upgrade Kit
  • Wafer Size: 300
  • Serial Number: TBD
  • Configuration: Upgrade Kit to FLEX HXE - OX Pillar Etch
  • Date Available: 01/30/2023
  • Group: Electronic
  • Owner: Micron
  • Category: Semiconductor Fabrication
  • Family: Etch Equipment
  • Type: Plasma Etch System
  • Manufacturer: Lam Research
  • Location: SINGAPORE