RMMT23006

  • Model Name: Altus Max
  • Wafer Size: 300
  • Configuration: Low Resistance Tungsten CVD
  • Date Available: 01/30/2023
  • Group: Electronic
  • Owner: Micron
  • Category: Semiconductor Fabrication
  • Family: Deposition Equipment
  • Type: Multi-Process CVD
  • Manufacturer: Lam Research
  • Location: SINGAPORE