RMMT21272

  • Model Name: Reflexion LK - ILD
  • Wafer Size: 300
  • Serial Number: TBD
  • Group: Electronic
  • Owner: Micron
  • Category: Semiconductor Fabrication
  • Family: Chemical Mechanical Polishing Equipment
  • Type: ILD (InterLayer Dielectric) CMP System (Oxide/Poly Silicon/STI)
  • Manufacturer: Applied Materials
  • Location: SINGAPORE