RMFR12029

  • Model Name: MegaTorr PS7 H2 purifier
  • Wafer Size: N/A
  • Serial Number: 207535
  • Configuration: SAES : Model # PS7-MGT40-H-2 * Bulk Hydrogen Gas PurifierSAES : Model # PS7-MGT40-H-2 * Bulk Hydrogen Gas Purifier
  • Description: Installed/Operational
  • Date Available: 08/08/2012
  • Owner: NXP
  • Category: Semiconductor Fabrication
  • Family: Clean Rooms and Equipment
  • Type: Chemical/Gas Treatment System
  • Manufacturer: SAES
  • Location: CHANDLER