ARSL10459

  • Model Name: Antares CX200
  • Wafer Size: 200
  • Serial Number: 0909-0015-1102
  • Description: Clean Room-Idle
  • Date Manufacturing: 01/11/2002
  • Date Available: 19/12/2014
  • Owner: AGSS LLC
  • Category: Semiconductor Fabrication
  • Family: Wafer Cleaning Equipment
  • Type: Single Wafer CryoKinetic Cleaning System
  • Manufacturer: FSI International
  • Location: PHOENIX