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PROCESS	MANUFACTURER	TYPE	WAFER
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VIEW	MANUFACTURER	MODEL	CONFIGURATION	PROCESS	WAFER	TOOL ID
	ADVANTEST	T3340	---	WAFER TEST - TESTER	150	TAKEDA-1
	ADVANTEST	T3340	---	WAFER TEST - TESTER	150	TAKEDA-10
	ADVANTEST	T3340	---	WAFER TEST - TESTER	150	TAKEDA-2
	ADVANTEST	T3340	---	WAFER TEST - TESTER	150	TAKEDA-5
	ADVANTEST	T3340	---	WAFER TEST - TESTER	150	TAKEDA-7
	AG ASSOCIATES	Heatpulse 8108	---	RTP	150	AST-8108B-ATA2
	AGILENT	HP 83000	---	BE - FINAL TEST	150	MAHP81
	APPLIED MATERIALS	Endura Chamber	---	PVD	150	AMT-Alum Chamber
	APPLIED MATERIALS	Endura Chamber	---	PVD	150	AMT-PVD Chamber
	APPLIED MATERIALS	P5000 CVD	3xCVD Teos BPSG Chambers	CVD - TEOS	150	AMI-CVD-3
	APPLIED MATERIALS	P5000 Etch Chamber	---	ETCH - OXIDE	150	AMIOX-70 Chamber
	BRANSON	Branson 5210-MTH	---	MISC - PARTS CLEAN	150	BRANSONIC1
	BRANSON	Branson 5210-MTH	---	MISC - PARTS CLEAN	150	BRANSONIC2
	BTI	BDF 41	---	FURNACE - HORIZONTAL	150	FMI-BDF1
	BUEHLER LTD	HANDIMET-II	---	LAB EQUIPMENT	150	PULIDORA
	DNS	SS-629BW	---	WET - SCRUBBER	150	DNS-629B-ATA2
	ELECTROGLAS	.	---	MISC	150	OCR
	ELECTROGLAS	OCR	---	WAFER TEST - PROBER	150	OCR (EG-9)
	GCA	8500 DSW	---	LITHO - i-LINE STEPPER	150	GCA-1
	JEOL	JWS-7500	---	METROLOGY - CD	150	JEOL-7500-1-MIA1
	JEOL	JWS-7515	---	METROLOGY - CD	150	REVSEM-2
	KLA TENCOR	2132	---	METROLOGY - DEFECT	150	KLA-2132-1-MIA1
	KLA TENCOR	2132	---	METROLOGY - DEFECT	150	KLA-2132-2-MIA1
	KLA TENCOR	2132	---	METROLOGY - DEFECT	150	KLA-2132-3-MIA1
	KLA TENCOR	2132	---	METROLOGY - DEFECT	150	KLA-3
	KLA TENCOR	2133	---	METROLOGY - DEFECT	150	KLA-4
	KLA TENCOR	2135	---	METROLOGY - DEFECT	150	KLAN-5
	KLA TENCOR	2552 Data Analysis System	---	METROLOGY - DEFECT	150	KLA-2552-1-MIA1
	KLA TENCOR	2552 Data Analysis System	---	METROLOGY - DEFECT	150	KLA-2552-2-MIA1
	KLA TENCOR	2552 Data Analysis System	---	METROLOGY - DEFECT	150	KLA-2552-4-MIA1
	KLA TENCOR	2552 Data Analysis System	---	METROLOGY - DEFECT	150	KLA-2552-5-MIA1
	KLA TENCOR	NONE	---	LAB EQUIPMENT	150	KLA-TISI
	KLA TENCOR	NONE	---	LAB EQUIPMENT	150	WPKLA7
	KLA TENCOR	SM-200	---	METROLOGY - FILMS	150	SPECTRAMAP
	KLA TENCOR	Thermawave OP-2690	---	METROLOGY - FILMS	150	T-WAVE-1
	LAM	Autoetch 490	---	ETCH - POLY	150	LAM-49C-ATA2
	LAM	Autoetch 490	---	ETCH - POLY	150	LAM-49E-ATA2
	LAM	Autoetch 490	---	ETCH - POLY	150	LAM-49F-ATA2
	LAM	Autoetch 490	---	ETCH - POLY	150	LAM-49G-ATA2
	LAM	Autoetch 490	---	ETCH - POLY	150	LAM-49H-ATA2
	LAM	Autoetch 490	---	ETCH - POLY	150	LAM-49I-ATA2
	LAM	Autoetch 490	---	ETCH - POLY	150	LAM-49J-ATA2
	LAM	Autoetch 490	---	ETCH - POLY	150	LAM-49L-ATA2
	LAM	Drytek 384-T	---	ETCH - OXIDE	150	TRIODO-12
	LAM	Drytek 384-T	---	ETCH - OXIDE	150	TRIODO-42
	LAM	Drytek 384-T	---	ETCH - OXIDE	150	TRIODO-5
	LAM	Drytek ASIQ	---	ETCH - METAL	150	ASIQ-20
	LAM	Drytek ASIQ	---	ETCH - METAL	150	ASIQ-21
	LAM	Rainbow 4420	PARTS MISSING	ETCH - POLY	150	LAM-44C-ATA2
	LAM	Rainbow 4500	---	ETCH - OXIDE	150	LAM-45A-ATA2

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