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PROCESS	MANUFACTURER	TYPE	WAFER
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VIEW	MANUFACTURER	MODEL	CONFIGURATION	PROCESS	WAFER	TOOL ID
	APPLIED MATERIALS	Centura PVD	1xSB Al PVD Chamber, 1xWB TTN PVD Chamber	PVD	200	MA64
	APPLIED MATERIALS	Centura PVD	2xPVD Chambers	PVD	200	MA76
	APPLIED MATERIALS	Endura	1xPC2 Chamber, 1x WB TTN PVD, 1xWB TTN PVD Chambers, 1xSB Al PVD Chambers, 1xVectra IMP Ti Chamber	PVD	200	AMT-5500-2-ISA1
	APPLIED MATERIALS	Endura	2xWB Ti PVD Chambers, 1xSB Al PVD Chamber, 1xSB TiN PVD Chamber	PVD	200	SPT708
	APPLIED MATERIALS	Endura	2xPC2 Chambers, 2xWB Sip Cu Chambers	PVD	200	SPA25
	APPLIED MATERIALS	Endura	2xPC2 Chambers, 2xWB Sip Cu Chambers	PVD	200	SPA26
	APPLIED MATERIALS	Endura	2xPC2 Chambers, 2xWB Ti PVD Chambers, 2xSB Al PVD Chambers	PVD	200	M4TCN181
	APPLIED MATERIALS	Endura	2xPC2 Chambers, 2xWB TTN PVD Chambers	PVD	200	M4TSP153
	APPLIED MATERIALS	Endura	2xSB Al PVD Chambers, 1xWB Ti PVD Chamber, 1xWB TTN PVD Chamber	PVD	200	M4TSP280
	APPLIED MATERIALS	Endura	2xPC2 Chambers, 2xWB Ti PVD Chambers	PVD	200	M4TSP282
	APPLIED MATERIALS	Endura	2xWB Ti PVD Chambers, 2xSB Al PVD Chambers	PVD	200	M4TSP284
	APPLIED MATERIALS	Endura	2xTxZ HP+ TiN Chambers, 1xVectra IMP Ti Chamber	PVD	200	M9TMO705
	APPLIED MATERIALS	Endura	2xTxZ HP+ TiN Chambers, 1xVectra IMP Ti Chamber	PVD	200	M9TMO706
	APPLIED MATERIALS	Endura	2xTxZ HP+ TiN Chambers, 1xVectra IMP Ti Chamber	PVD	200	M9TMO707
	APPLIED MATERIALS	Endura	2xTxZ HP+ TiN Chambers, 1xVectra IMP Ti Chamber	PVD	200	M9TMO708
	APPLIED MATERIALS	Endura	2xTxZ HP+ TiN Chambers, 1xVectra IMP Ti Chamber	PVD	200	M9TMO709
	APPLIED MATERIALS	Endura	2xTxZ HP+ TiN Chambers, 1xVectra IMP Ti Chamber	PVD	200	M9TMO801
	APPLIED MATERIALS	Endura	2xTxZ HP+ TiN Chambers, 1xVectra IMP Ti Chamber	PVD	200	M9TMO802
	APPLIED MATERIALS	Endura	2xTxZ HP+ TiN Chambers, 1xVectra IMP Ti Chamber	PVD	200	M9TMO803
	APPLIED MATERIALS	Endura	2xPC2 Chambers, 2xWB Ti PVD Chambers	PVD	200	M4TSP288
	APPLIED MATERIALS	Endura	1xPC2 Chamber, 1xWB Ti PVD Chamber, 1xWB TTN PVD Chamber, 2xSB Al PVD Chambers	PVD	200	M4TSP281
	APPLIED MATERIALS	Endura	---	PVD	200	MA84
	APPLIED MATERIALS	Endura Chamber	---	PVD	200	AMI-PVD4-AOA2
	APPLIED MATERIALS	Endura Chamber	---	PVD	150	AMT-Alum Chamber
	APPLIED MATERIALS	Endura Chamber	---	PVD	150	AMT-PVD Chamber
	APPLIED MATERIALS	Endura Vectra IMP Chamber	---	PVD	200	Chamber B
	APPLIED MATERIALS	Endura WB Chamber	---	PVD	200	AMI-PVD1-AOA2
	NOVELLUS	Inova	2xInova Chambers	PVD	200	D214125
	ULVAC	CERAUS Z-1000	2xAl Chambers, 1xTiN Chamber	PVD	200	MA75
	ULVAC	CERAUS Z-1000	2xAl Chambers, 1xTiN Chamber	PVD	200	MP21
	ULVAC	CERAUS Z-1000	2xAl Chambers, 1xTiN Chamber	PVD	200	MA82
	ULVAC	CERAUS Z-1000	2xAl Chambers, 1xTiN Chamber	PVD	200	MA90
	ULVAC	CERAUS Z-1000	2xTiTiN Chambers	PVD	200	MB21
	ULVAC	CERAUS Z-1000	2xTiN Chambers	PVD	200	MB24
	ULVAC	CERAUS Z-1000	2xTiTiN Chambers	PVD	200	MB55
	ULVAC	CERAUS Z-1000	2xTiN Chambers, 1xAl Chamber	PVD	200	MC01
	ULVAC	CERAUS Z-1000	1xAl Chamber, 1xTiN Chamber	PVD	200	ML26
	ULVAC	CERAUS Z-1000	2xWSi Chambers	PVD	200	MW22
	ULVAC	CERAUS Z-1000	3xTiN Chambers	PVD	200	ML30
	ULVAC	CERAUS?Z-1000	2xAl Chambers, 1xTiN Chamber	PVD	200	MA74
	ULVAC	CERAUS?Z-1000	2xAl Chambers, 1xTiN Chamber	PVD	200	MA78
	ULVAC	CERAUS?Z-1000	2xAl Chambers, 1xTiN Chamber	PVD	200	MB22
	ULVAC	CERAUS?Z-1000	2xAl Chambers, 1xTiN Chamber	PVD	200	ME25
	ULVAC	CERAUS?Z-1000	2xAl Chambers, 1xTiN Chamber	PVD	200	ML25
	ULVAC	CERAUS?Z-1000	2xAl Chambers, 1xTiN Chamber	PVD	200	ML72
	ULVAC	ENTRON	2xLTS Ti Chamber, 1xConvCo Chamber, 1xViaCln Chamber, 1xHotMod Chamber, 1xEtch Chamber	PVD	200	MD21

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