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PROCESS	MANUFACTURER	TYPE	WAFER
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VIEW	MANUFACTURER	MODEL	CONFIGURATION	PROCESS	WAFER	TOOL ID
	APPLIED MATERIALS	Centura eMax	4xEMax Chambers, SMIF	ETCH - OXIDE	200	CENTF55
	APPLIED MATERIALS	Centura eMax	4xEMax Chambers, SMIF	ETCH - OXIDE	200	CENTF56
	APPLIED MATERIALS	Centura eMax	4xEMax Chambers, SMIF	ETCH - OXIDE	200	CENTF58
	APPLIED MATERIALS	Centura eMax	3xEMax Chambers	ETCH - OXIDE	200	M7EAE501
	APPLIED MATERIALS	Centura eMax	3xEMax Chambers	ETCH - OXIDE	200	M7EAE502
	APPLIED MATERIALS	Centura eMax	3xEMax Chambers	ETCH - OXIDE	200	M7EAE703
	APPLIED MATERIALS	Centura eMxP+	3xeMxP+ Chambers	ETCH - OXIDE	200	D214177
	APPLIED MATERIALS	Centura eMxP+	3xeMxP+ Chambers	ETCH - OXIDE	200	D214175
	APPLIED MATERIALS	Centura MxP+ Oxide	3xMxP+ Oxide Chambers	ETCH - OXIDE	200	RM72
	APPLIED MATERIALS	Centura MxP+ Oxide	3xMxP+ Oxide Chambers	ETCH - OXIDE	200	RM51
	APPLIED MATERIALS	Centura Super E	3xSuper E Chambers	ETCH - OXIDE	200	M7EAS501
	APPLIED MATERIALS	Centura Super E	3xSuper E Chambers	ETCH - OXIDE	200	M7EAS502
	APPLIED MATERIALS	P5000 Etch Chamber	---	ETCH - OXIDE	150	AMIOX-70 Chamber
	LAM	2300 Versys Exelan	3xExelan Chambers	ETCH - OXIDE	200	RO40
	LAM	2300 Versys Exelan Flex	3xExelan Flex Chambers	ETCH - OXIDE	200	RF05
	LAM	2300 Versys Exelan Flex	3xExelan Flex Chambers	ETCH - OXIDE	200	RF06
	LAM	2300 Versys Exelan Flex	3xExelan Flex Chambers	ETCH - OXIDE	200	RF07
	LAM	Alliance A4 9500	3x9500 Chambers	ETCH - OXIDE	200	D156721
	LAM	Alliance A4 9500	3x9500 Chambers	ETCH - OXIDE	200	D156722
	LAM	Alliance A4 9500	3x9500 Chambers	ETCH - OXIDE	200	D214147
	LAM	Alliance A4 9500	3x9500 Chambers	ETCH - OXIDE	200	D214145
	LAM	Alliance A4 9500	3x9500 Chambers	ETCH - OXIDE	200	D214146
	LAM	Alliance A6 4528-XL	3x4528XL Chambers	ETCH - OXIDE	200	M7ELX701
	LAM	Alliance A6 Exelan-HP	3xExelan HP Chambers	ETCH - OXIDE	200	LAM-EXELAN-MIA1
	LAM	Drytek 384-T	---	ETCH - OXIDE	150	TRIODO-12
	LAM	Drytek 384-T	---	ETCH - OXIDE	150	TRIODO-42
	LAM	Drytek 384-T	---	ETCH - OXIDE	150	TRIODO-5
	LAM	Rainbow 4500	---	ETCH - OXIDE	150	LAM-45A-ATA2
	LAM	Rainbow 4500	---	ETCH - OXIDE	150	LAM-45B-ATA2
	LAM	Rainbow 4500	---	ETCH - OXIDE	150	LAM-45C-ATA2
	LAM	Rainbow 4500	---	ETCH - OXIDE	150	LAM-45G-ATA2
	LAM	Rainbow 4520	PARTS MISSING	ETCH - OXIDE	200	OXE18
	LAM	Rainbow 4520	DATA ERROR	ETCH - OXIDE	200	OXE01
	LAM	Rainbow 4520	---	ETCH - OXIDE	200	OXE39
	LAM	Rainbow 4520	---	ETCH - OXIDE	200	OXE 02
	LAM	Rainbow 4520	WATER DAMAGED	ETCH - OXIDE	200	OXE429
	LAM	Rainbow 4520	---	ETCH - OXIDE	200	OXE432
	LAM	Rainbow 4520	---	ETCH - OXIDE	200	OXE38
	LAM	Rainbow 4520	---	ETCH - OXIDE	200	OXE01A
	LAM	Rainbow 4520	---	ETCH - OXIDE	200	OXE 10
	LAM	Rainbow 4520	---	ETCH - OXIDE	200	OXE23
	LAM	Rainbow 4520	---	ETCH - OXIDE	200	OXE09
	LAM	Rainbow 4520	---	ETCH - OXIDE	200	OXE06
	LAM	Rainbow 4520	---	ETCH - OXIDE	200	OXE139
	LAM	Rainbow 4520	---	ETCH - OXIDE	200	OXE137
	LAM	Rainbow 4520	---	ETCH - OXIDE	200	OXE16
	LAM	Rainbow 4520	---	ETCH - OXIDE	200	OXE41
	LAM	Rainbow 4520	---	ETCH - OXIDE	200	OXE163
	LAM	Rainbow 4520	---	ETCH - OXIDE	200	OXE04
	LAM	Rainbow 4520	---	ETCH - OXIDE	200	OXE01B

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