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TYPE
WAFER
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VIEW MANUFACTURER MODEL CONFIGURATION PROCESS WAFER TOOL ID
KLA TENCOR1007X---LAB EQUIPMENT200D207631
KLA TENCOR2131---METROLOGY - DEFECT200D207638
KLA TENCOR2132---METROLOGY - DEFECT150KLA-2132-1-MIA1
KLA TENCOR2132---METROLOGY - DEFECT150KLA-2132-2-MIA1
KLA TENCOR2132---METROLOGY - DEFECT200KLA-21XX2-PFA2
KLA TENCOR2132---METROLOGY - DEFECT150KLA-2132-3-MIA1
KLA TENCOR2132---METROLOGY - DEFECT150KLA-3
KLA TENCOR2133---METROLOGY - DEFECT150KLA-4
KLA TENCOR2135---METROLOGY - DEFECT150KLAN-5
KLA TENCOR2135---METROLOGY - DEFECT200KLA408
KLA TENCOR2135---METROLOGY - DEFECT200KLA004
KLA TENCOR2135---METROLOGY - DEFECT200KLA702
KLA TENCOR2135---METROLOGY - DEFECT200QK73
KLA TENCOR2135---METROLOGY - DEFECT200QK77
KLA TENCOR2139---METROLOGY - DEFECT200DIA06
KLA TENCOR2139---METROLOGY - DEFECT200M4PPW110
KLA TENCOR2552 Data Analysis System---METROLOGY - DEFECT150KLA-2552-1-MIA1
KLA TENCOR2552 Data Analysis System---METROLOGY - DEFECT150KLA-2552-2-MIA1
KLA TENCOR2552 Data Analysis System---METROLOGY - DEFECT150KLA-2552-4-MIA1
KLA TENCOR2552 Data Analysis System---METROLOGY - DEFECT150KLA-2552-5-MIA1
KLA TENCORADE UltraGauge 9500---METROLOGY - STRESS200D214411
KLA TENCORAIT---METROLOGY - PARTICLE200AIT-USA
KLA TENCORAIT---METROLOGY - PARTICLE200KLA-AIT-Cu
KLA TENCORAIT---METROLOGY - PARTICLE200D214235
KLA TENCORAIT---METROLOGY - PARTICLE200D214419
KLA TENCORAIT-II---METROLOGY - PARTICLE200AIT2-INT
KLA TENCORAIT-XPSMIFMETROLOGY - PARTICLE200AIT3F02
KLA TENCORArcher 10---METROLOGY - OVERLAY200M4POL130
KLA TENCORArcher 10---METROLOGY - OVERLAY200M7POL401
KLA TENCORArcher 10-XT---METROLOGY - OVERLAY200M4POL122
KLA TENCORArcher 10-XT---METROLOGY - OVERLAY200M4POL201
KLA TENCORASET-F5x---METROLOGY - FILMS200M7DTM101
KLA TENCOREM1---METROLOGY - INSPECTION200D214619
KLA TENCOReS20-XP---METROLOGY - E-BEAM200KLA-ES20-AOA2
KLA TENCORFLX-5400---METROLOGY - STRESS200M7TSM401
KLA TENCORKiethley Quantox---METROLOGY - FILMS200KTH-QTX-1
KLA TENCORKiethley Quantox---METROLOGY - FILMS200D214305
KLA TENCORLeica Vistec INS3000---METROLOGY - INSPECTION200M4ERV030
KLA TENCORLeica Vistec INS3000---METROLOGY - INSPECTION200M4PRV120
KLA TENCORLeica Vistec INS3000---METROLOGY - INSPECTION200M4PRV201
KLA TENCORLeica Vistec INS3000---METROLOGY - INSPECTION200M7EAI401
KLA TENCORLeica Vistec INS3000---METROLOGY - INSPECTION200M7EAI601
KLA TENCORLeica Vistec INS3000---METROLOGY - INSPECTION200M7EAI901
KLA TENCORNONE---LAB EQUIPMENT150KLA-TISI
KLA TENCORNONE---LAB EQUIPMENT150WPKLA7
KLA TENCORP-2---METROLOGY - PROFILE200D211602
KLA TENCORRS-35---METROLOGY - RESISTIVITY200D207636
KLA TENCORRS-35---METROLOGY - RESISTIVITY200D207654
KLA TENCORRS-35C---METROLOGY - RESISTIVITY200QBX4
KLA TENCORRS-55---METROLOGY - RESISTIVITY200OM 004

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